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Á¦Ç°Á¾·ù | ¿ëµµ | Ư¡ |
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TMAH Base (Tetramethylammonium hydroxide) (DP-112, 113) |
¹ÝµµÃ¼ / µð½ºÇ÷¹ÀÌ °øÁ¤¿ë - ¹ÝµµÃ¼ ÆÐÅ°Áö, Æ÷Å丶½ºÅ© - LED, LCD, TSP µî |
- ´Ù¾çÇÑ ³óµµ ´ëÀÀ °¡´É - TMAH ÇÔ·® Á¤¹Ð Á¦¾î °¡´É ex) 2.380 ¡¾ 0.003% - ppb ´ÜÀ§ Metal Impurity Á¦¾î - 0.3§ Particle 50ea ÀÌÇÏ °ü¸® |
Alkaline Base (KOH, Na2CO3 ¹× ±âŸ) (APND-10, APDE-3) |
¹ÝµµÃ¼ / µð½ºÇ÷¹ÀÌ °øÁ¤¿ë - ¹ÝµµÃ¼ ÆÐÅ°Áö - TSP µî |
- Alkaline ÇÔ·® Á¤¹Ð Á¦¾î °¡´É : ¡¾ 0.01% - ppb ´ÜÀ§ Metal Impurity Á¦¾î |